Performance evaluation is a systematic review that helps organizations to achieve their goals. This study evaluates and ranks Yazd Science and Technology Park’s high-tech firms, using integration Data Envelopment Analysis into Six Sigma methodology. In this study a combination of both methods is used to propose more effective and efficient performance evaluation framework. By studying research literature in the field of Science and Technology Park’s firms’ performance evaluation and using Fuzzy Delphi, Effective criteria for measuring the performance of Yazd Science and Technology Park’s firms are identified, then by reviewing research literature and experts’ opinions, inputs and outputs of DEA model are identified. Then, by using combining DMAIC circle and DEA, an inclusive approach for In the analysis phase of Six Sigma evaluating performance is suggested. process ranking of firms is identified using DEA scores. This research helps firms’ managers to find the effective criteria on their performance and how they can improve these factors and control its impacts.